Determination of the metal nanometer layer thickness and semiconductor conductivity in metal-semiconductor structures from electromagnetic reflection and transmission spectra |
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| Authors: | D. A. Usanov A. V. Skripal A. V. Abramov A. S. Bogolyubov |
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| Affiliation: | (1) Tchernyshevsky State University, Saratov, 410012, Russia |
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| Abstract: | Interaction of electromagnetic radiation with metal-semiconductor nanometer structures is studied theoretically and experimentally. A technique for nondestructive multiparametric control of the electrophysical parameters of metal nanometer layers and semiconductor conductivity in metal-semiconductor structures using electromagnetic reflection and transmission spectra is proposed and tested experimentally. |
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