| 利用计算机辅助装调检测矩形大口径离轴非球面的方法研究 |
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| 引用本文： | 杨晓飞,韩昌元.利用计算机辅助装调检测矩形大口径离轴非球面的方法研究[J].光学技术,2004,30(5):532-534. |
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| 作者姓名： | 杨晓飞 韩昌元 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所,长春,130022 |
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| 摘 要： | 通过非球面的零位补偿法,完成了对矩形大口径离轴非球面镜的检测。先用光学设计软件Zemax从理论上分析了在检测中会出现的现象,并结合计算机辅助装调技术,确定在检测过程中相对敏感的自由度,然后控制这些量,使补偿器和非球面的相对关系与理论设计相吻合,在Zygo相位干涉仪上测得最终结果。在λ=632.8nm时,中心圆口径与两个边缘圆口径面形误差RMS分别为0.022λ,0.037λ,0.032λ。检测结果,达到预期目的。
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| 关 键 词： | 离轴非球面 计算机辅助装调 零位补偿法 灵敏度矩阵 |
| 文章编号： | 1002-1582(2004)05-0532-03 |
| 修稿时间： | 2003年12月17 |
Study on testing methods of large-aperture rectangle off-axis aspherical surface with computer aided alignment |
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| YANG Xiao-fei,HAN Chang-yuan.Study on testing methods of large-aperture rectangle off-axis aspherical surface with computer aided alignment[J].Optical Technique,2004,30(5):532-534. |
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| Authors: | YANG Xiao-fei HAN Chang-yuan |
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| Abstract: | By means of null compensator testing, an off-axis aspherical mirror with a lager-aperture rectangle is tested successfully. Optical testing system consists of Zygo module interferometer and null compensator and aspherical mirror. This system is analyzed with optical design software Zemax. The sensitivity matrix of aspherical mirror is calculated. Respective value of sensitivity matrix is optimized and compared and non-sensitive freedom degree is omited. The contact among sensitive freedom degree value is found, then the freedom degree is controlled. Zygo interferometer and aspheric mirror accord to theory value. When λ=632.8nm, the mirror surface error RMS with mid-circle aperture is 0.022λ. |
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| Keywords: | off-axis aspherical surface computer aided alignment null compensator testing sensitive matrix |
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