A quantitative method for dual‐pass electrostatic force microscopy phase measurements |
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| Authors: | Minjun Yan Gary H Bernstein |
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| Institution: | 1. Department of Electrical Engineering, University of Notre Dame, Notre Dame, IN 46556, USADepartment of Electrical Engineering, University of Notre Dame, Notre Dame, IN 46556, USA.;2. Department of Electrical Engineering, University of Notre Dame, Notre Dame, IN 46556, USA |
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| Abstract: | Electrostatic force microscopy (EFM) has become a powerful tool for investigating charges on surfaces. The use of phase measurement in EFM is a direct and fast way to detect electrostatic force gradients, but only qualitatively. With the dual‐pass scheme, the phase signal at lifted height is often assumed to exclude any influences from the topography, but it does not. We report the collection of both topography and phase data by EFM on charged, micron‐sized metal wires. In order to quantify the electrostatic force, a cone model and finite element analysis are provided to integrate the force gradient from the phase signal. Copyright © 2007 John Wiley & Sons, Ltd. |
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| Keywords: | electrostatic force microscopy phase measurement kelvin probe force microscopy force gradient |
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