Application of ion chromatography in the semiconductor industry |
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| Affiliation: | 1. University Politehnica Timişoara, Faculty of Industrial Chemistry and Environmental Engineering, 6 Vasile Pârvan Blvd., Timişoara, RO-300223, Romania;2. Institute of Chemistry Timişoara of Romanian Academy, 24 Mihai Viteazul Blvd., Timişoara, RO-300223, Romania;3. University Politehnica Timişoara, Research Institute for Renewable Energy, 2 Piata Victoriei, Timişoara, RO-300006, Romania;4. National Institute for Research&Development in Electrochemistry and Condensed Matter – INCEMC Timişoara, 144 Dr. Aurel Păunescu Podeanu, Timişoara, RO-300569, Romania;5. “Vasile Goldiş” Western University of Arad, Faculty of Pharmacy, 86 Liviu Rebreanu, Arad, RO-310045, Romania;6. “Victor Babeş” University of Medicine and Pharmacy of Timişoara, Faculty of Medicine, 2 Eftimie Murgu Sq., Timişoara, RO-300041, Romania;7. National Institute for Research and Development in Electrical Engineering – INCDIE ICPE-CA, 313 Splaiul Unirii, District 3, Bucharest, RO-030138, Romania;1. Department of Chemistry, Ben-Gurion University, Beer Sheva 84105, Israel;2. Department of Chemistry, University of Douala, PO Box 2701, Douala, Cameroon;3. Department of Biotechnology Engineering, Ben-Gurion University, Beer Sheva 84105, Israel;4. Department of Clinical Biochemistry, Ben-Gurion University, Beer Sheva 84105, Israel;1. College of Environmental and Chemical Engineering, Shanghai University of Electric Power, Shanghai 200090, China;2. CAS Key Laboratory of Nanosystem and Hierarchical Fabrication, National Center for Nanoscience and Technology, Beijing 100190, China |
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| Abstract: | ![]()
This review discusses ion-chromatographic advances in the semiconductor industry during the past 5 years. Through the development of more selective and sensitive instruments and columns, plus better attention to contamination control, the detection limits for many analyses are now in the low-ppt (w/w) range. The primary area of interest continues to be anion analysis, since spectroscopy remains the industry's preferred technique for quantifying cationic species. Noteworthy ion-chromatographic methods for analyzing semiconductor chemicals, gases, and solid samples are discussed and evaluated critically. Thirty-eight references are included. |
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