Surface properties of diamond-like carbon films prepared by CVD and PVD methods |
| |
Authors: | Liu Dong-Ping Liu Yan-Hong and Chen Bao-Xiang |
| |
Institution: | Department of Mathematics and Physics, Dalian Nationality University, Dalian 116600, China; State Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024, China |
| |
Abstract: | Diamond-like carbon (DLC) films have been deposited using three different
techniques: (a) electron cyclotron resonance---plasma source ion
implantation, (b) low-pressure dielectric barrier discharge, (c)
filtered---pulsed cathodic arc discharge. The surface and mechanical properties of
these films are compared using atomic force microscope-based tests. The experimental results
show that hydrogenated DLC films are covered with soft surface layers
enriched with hydrogen and sp$^{3}$ hybridized carbon while the soft surface
layers of tetrahedral amorphous carbon (ta-C) films have graphite-like
structure. The formation of soft surface layers can be associated with the
surface diffusion and growth induced by the low-energy deposition process.
For typical CVD methods, the atomic hydrogen in the plasmas can contribute
to the formation of hydrogen and sp$^{3}$ hybridized carbon enriched
surface layers. The high-energy ion implantation causes the
rearrangement of atoms beneath the surface layer and leads to an increase in film
density. The ta-C films can be deposited using the medium energy carbon ions
in the highly-ionized plasma. |
| |
Keywords: | diamond-like carbon film film deposition atomic
force microscope |
本文献已被 维普 等数据库收录! |
| 点击此处可从《中国物理 B》浏览原始摘要信息 |
| 点击此处可从《中国物理 B》下载免费的PDF全文 |
|