Determination of Aberration Coefficient of Microoptic Arrays from Axial Confocal Response by Neural Method |
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| Authors: | Yoshiaki Yasuno Tobias Wiesendanger Aiko Ruprecht Toyohiko Yatagai Hans J Tiziani |
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| Institution: | (1) Institut für Technische Optik, University of Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany;(2) Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennôdai, Tsukuba, Ibaraki 305-8573, Japan |
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| Abstract: | We propose a high-speed and parallel method to determine lens aberrations from its confocal axial response. This method analyzes the intensity confocal response including the aberration information of the objective lens by means of neural network algorithm. This method is designed to work parallely for many microlenses, and simultaneously determines aberrations of each element of a microlens array. A prototype system can determine spherical aberration coefficients of a microlens in the range from −0.7λ to 0.3λ with less than 1% RMS error. |
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| Keywords: | neural network confocal micro optics aberration |
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