Formation and decomposition of a volatile Zn-containing complex for the synthesis of ZnO films

The formation of a Zn-containing complex on a ZnO target in an H₂O₂ vapor medium, the sublimation of this complex, and the decomposition of the complex to the original compound are considered. UV preirradiation of the target raises the concentration of the Zn-containing complex in the gas phase in proportion to the irradiation time. The rate constant of the decomposition of the complex on a substrate is reported. The activation energy and the preexponential factor (k ₀) for the decomposition reaction are derived from the temperature dependence of the rate constant. The fact that the activation energy of the decomposition of the complex is similar to that of hydrogen peroxide decomposition suggests that the complex has a peroxide-like structure. The experimental and calculated k ₀ data indicate that the decomposition reaction is monomolecular.