Surface recombination probabilities of H on stainless steel, a-Si:H and oxidized silicon determined by threshold ionization mass spectrometry in H2 RF discharges

H atom densities are measured by threshold ionization mass spectrometry in a H₂ parallel-plate RF discharge. Variations of H density near the surface in steady-state discharge conditions reveal different surface loss probabilities γ on stainless steel, hydrogenated amorphous silicon (a-Si:H) and oxidized silicon. Absolute γ values are obtained from time-resolved H density measurements in afterglow. The etching probability of Si per H atom incident on a-Si:H is also derived by monitoring SiH₄ partial pressure and SiH(A²Δ) optical emission.