| 基于微机电系统技术的投影型微光学编码器 |
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| 引用本文： | 李以贵,远藤哲生,羽根一博.基于微机电系统技术的投影型微光学编码器[J].光学学报,2003,23(8):005-1007. |
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| 作者姓名： | 李以贵 远藤哲生 羽根一博 |
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| 作者单位： | 1. 上海交通大学微纳米技术研究院,上海,200030
2. 日本东北大学机械电子系,日本仙台市,980-8579 |
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| 基金项目： | 日本文部省基金资助课题 |
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| 摘 要： | 对投影型微光学编码器的原理进行了分析，结合微机电系统集成技术，提出并实现了投影型微光学编码器。它是利用微机电系统集成技术将标尺光栅、指示光栅、光电二极管集成化构成投影型光栅微编码器。它具有体积小、光路调整容易的特点。实验结果表明，利用微细加工制作微光学编码器是完全可行的。该器件较之传统的光学编码器在经济性及小型化等方面具有非常明显的优势。
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| 关 键 词： | 投影型微光学编码器 微机电系统 系统集成技术 光栅微编码器 光栅成像 位置测量 |
| 收稿时间： | 2002/5/28 |
Projection Type Micro-Optical Encoder Based on MEMS Technology |
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| Li Yigui Tetsuo Endo Kazuhiro Hane Institute of Micro/Nanometer Science and Technology,Shanghai Jiaotong University,Shanghai.Projection Type Micro-Optical Encoder Based on MEMS Technology[J].Acta Optica Sinica,2003,23(8):005-1007. |
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| Authors: | Li Yigui Tetsuo Endo Kazuhiro Hane Institute of Micro/Nanometer Science and Technology Shanghai Jiaotong University Shanghai |
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| Institution: | Received 28 May 2002; revised 23 August 2002 |
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| Abstract: | The principle of projection type micro optical encoder has been described and the optics theory of grating imaging is deduced. And the encoder is developed based on MEMS technology. The integrated encoder consists of scale grating, index grating and photodiodes therefore it is compact and easy to alignment. Experiment indicates that the fabricated encoder can measure the displacement and is completely feasible and has obvious advantages both in cost and miniaturization compared with traditional optic encoder. |
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| Keywords: | micro\|opto\|electromechanical system (MOEMS) projection type encoder grating imaging |
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