高导热金刚石薄膜的研究

分析了影响金刚石膜热导率的主要因素，指出声子的散射是造成金刚石膜热导率降低的主要原因．采用光热偏转法实现了金刚石薄膜热导率的测试，测量误差小于5%，从减少杂质和晶界对导热声子的散射入手，研究了在不同的制备方法下碳源气体和金刚石膜内晶粒取向对其热导率的影响．结果表明在低碳源气体浓度下采用微波等离子体化学汽相沉积方法制备的具有较高程度（400）晶粒取向的金刚石薄膜具有高的热导率性质．优化的工艺条件制备出热导率为15.2W/（K·cm）左右的金刚石膜．关键词：

STUDY OF THE DIAMOND FILMS WITH HIGH THERMAL CONDUCTIVITY

The scattering of phonons as main factors infuencing the thermal conductivity were analized theoretically. The thermal conductivity of diamond films was measured by means of the photothermal deflection method with an error of 5%. The effects of methane concentration and grain orientation on thermal conductivity of diamond films were studied. The results showed that (100) oriented diamond-films deposited by microwave plasma chemical vapour deposition method under low methane concentration have higher thermal conductivity.