| 纤锌矿GaN薄膜光学性质的研究 |
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| 引用本文： | 李雪,魏彦峰,龚海梅,方家熊.纤锌矿GaN薄膜光学性质的研究[J].光子学报,2007,36(2):304-307. |
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| 作者姓名： | 李雪 魏彦峰 龚海梅 方家熊 |
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| 作者单位： | 中国科学院上海技术物理所,传感技术国家重点实验室,上海,200083 |
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| 基金项目： | 上海市科学技术委员会课题(046105016)资助 |
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| 摘 要： | 在测试大量纤锌矿GaN外延薄膜透射光谱基础上,通过对有代表性的四个样品的透射光谱进行拟合,获取了GaN外延薄膜的光学常量并计算了薄膜厚度.结果表明:GaN外延薄膜的折射率差异较小,但在370～800 nm波长范围内消光系数差异很大,GaN薄膜的消光系数差异在一定程度上可用以评价外延薄膜的质量.
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| 关 键 词： | GaN 透射光谱 折射率 消光系数 |
| 文章编号： | 1004-4213（2007）02-0304-4 |
| 收稿时间： | 2005-10-19 |
| 修稿时间： | 2005-10-19 |
Study on Optical Characteristics of Wurtzine GaN |
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| LI Xue,WEI Yan-feng,GONG Hai-mei,FANG Jia-xiong.Study on Optical Characteristics of Wurtzine GaN[J].Acta Photonica Sinica,2007,36(2):304-307. |
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| Authors: | LI Xue WEI Yan-feng GONG Hai-mei FANG Jia-xiong |
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| Institution: | State Key Laboratories of Transducer Technology ,Shanghai Institute of Technical Physics Chinese Academy of Sciences, Shanghai 200083 ,China |
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| Abstract: | GaN epitaxial films with the wurtzine structure were measured using the transmission spectra.Optical constants and thickness of GaN epitaxial films were obtained by fitting transmission spectra of typical samples.It is showed that the refractive index has a little difference among GaN epitaxial films,however the extinction efficiency with the range of wavelength from 370 nm to 800 nm has the large diffrence.The difference of extinction efficiency can value the quality of GaN films to a certain extent. |
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| Keywords: | GaN Transmission spectra Refractive index Extinction efficiency |
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