微腔等离子体放电过程的数值研究

采用2维自洽完全流体模型，数值研究了阳极为通孔的高气压微腔放电结构中等离子体参数的变化过程。模拟结果获得了当氩气压强为13.3 kPa时，放电中的电势分布、等离子体密度分布、径向电场分布和电子温度分布等重要参数的演化过程。模拟结果表明在放电过程中，阴极附近的电场由轴向电场逐步转变为径向电场，等离子体密度最大值位于放电腔中间处，并随时间推移由阳极附近向阴极附近移动，电子温度的最大值出现在阴极环形鞘层区域。

Numerical study on discharge process of microcavity plasma

The evolution of plasma parameters during high pressure discharge in the microcavity with a hollow anode was numerically studied, with a two-dimensional self-consistent fluid model. The simulations were performed with argon at 13.3 kPa. The numerical results show that during the discharge the electric field around the cathode transforms from an axial field to a radial field, the plasma density gets the maximum value on the central line of the cavity and the location of the maximum density moves from the region near anode at the initial stage to the cathode vicinity at the stable stage, and the maximum electron temperature occurs in the ring sheath of cathode.