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| (002)取向AIN薄膜的Raman光谱 | |
| 引用本文： | 赵永年,王波,何志,罗微,邹广田. (002)取向AIN薄膜的Raman光谱[J]. 光散射学报, 1997, 0(Z1) |
| 作者姓名： | 赵永年 王波 何志 罗微 邹广田 |
| 作者单位： | 吉林大学超硬材料国家重点实验室 |
| 摘 要： | （００２）取向ＡＩＮ薄膜的Ｒａｍａｎ光谱赵永年王波何志罗微邹广田（吉林大学超硬材料国家重点实验室长春１３００２３）ＲａｍａｎＳｐｅｃｔｒａｏｆＡＩＮＦｉｌｍｓＯｒｉｅｎｔｅｄｉｎ（００２）ＺｈａｏＹｏｎｇｎｉａｎ，ＷａｎｇＢｏ，ＨｅＺｈｉ，ＬｕｏＷｅ... |
Raman Spectra of AIN Films Oriented in(002) |
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| Abstract: | Abstract AlN films oriented in (002) were prepared by RF sputtering. Raman spectra were measured by T6400 Raman spectrometer. A 1(TO),A 1(LO),E 1(LO) and E 2 Raman active modes and some Raman peaks of the hydrolysate were obtained. |
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