| (002)取向AIN薄膜的Raman光谱 |
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| 引用本文： | 赵永年,王波,何志,罗微,邹广田.(002)取向AIN薄膜的Raman光谱[J].光散射学报,1997(Z1). |
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| 作者姓名： | 赵永年 王波 何志 罗微 邹广田 |
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| 作者单位： | 吉林大学超硬材料国家重点实验室 |
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| 摘 要： | （００２）取向ＡＩＮ薄膜的Ｒａｍａｎ光谱赵永年王波何志罗微邹广田（吉林大学超硬材料国家重点实验室长春１３００２３）ＲａｍａｎＳｐｅｃｔｒａｏｆＡＩＮＦｉｌｍｓＯｒｉｅｎｔｅｄｉｎ（００２）ＺｈａｏＹｏｎｇｎｉａｎ，ＷａｎｇＢｏ，ＨｅＺｈｉ，ＬｕｏＷｅ...
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Raman Spectra of AIN Films Oriented in(002) |
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| Abstract: | Abstract AlN films oriented in (002) were prepared by RF sputtering. Raman spectra were measured by T6400 Raman spectrometer. A 1(TO),A 1(LO),E 1(LO) and E 2 Raman active modes and some Raman peaks of the hydrolysate were obtained. |
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