首页 | 本学科首页   官方微博 | 高级检索  
     检索      


Parametric dependence of the properties of pulsed-laser-deposited diamond-like carbon films
Authors:C W Ong  X A Zhao  J T Cheung  S K Lam  P W Chan  C L Choy
Institution:(1) Department of Applied Physics and Materials Research Center, The Hong Kong Polytechnic University, Hung Horn, Kowloon, Hong Kong;(2) Present address: Shanghai Research Institute of Materials, Shanghai People's Republic of China;(3) Present address: Rockwell International, Thousand Oaks, CA, USA
Abstract:The properties of Pulsed-Laser-Deposited Diamond-Like Carbon (PLD DLC) films are studied as functions of the power densityPHgr and the wavelengthlambda of the laser beam, and the incident anglethetav of the beam relative to the normal of the target surface. All the films have a similar structure consisting of graphite particulates embedded in a continuous matrix, so the macroscopic performance of the films is determined by the overall contributions of the particulates and the matrix. The use of higherPHgr, shorterlambda, or largerthetav leads to an enhancement of the diamond-like characteristics and a simultaneous increase of the particulate density. These two effects give opposite contributions to the electrical conductivitysgr R, leading to the following results. (i) sgrR drops with increasingPHgr in the lowPHgr range (region I) due to the stronger diamond-like nature of the matrix, but increases sharply afterPHgr has exceeded a thresholdPHgr min as a result of the rapid increase in particulate density. (ii) In region I, the use of shorterlambda or largerthetav leads to a more diamond-like matrix, and this overwhelms the degradation effect caused by the slight increase in particulate density. The samples thus become more insulating. In the highPHgr region (region II), however, the use of shorterlambda or largerthetav gives rise to higher particulate density, thereby increasing the electrical conductivity.
Keywords:68  60  81  15  68  55
本文献已被 SpringerLink 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号