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Determination of displacement with a piezoelectric transducer using phase-shift algorithms |
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| Authors: | Cheng-Chung Jaing Yi-Lin Shie Chien-Jen Tang Yeuh-Yeong Liou Chun-Ming Chang Chii-Rong Yang |
| Affiliation: | (1) Department of Philosophy, Harvard University, Cambridge, MA 02138, USA |
| Abstract: | This investigation accurately measures the relationship between applied voltage and the displacement of a piezoelectric transducer device both by analyzing phase shifting interferometry algorithms and using a Twyman-Green interferometer. Simulations are performed to calculate unknown phase shifts, especially around π/2 and 3π/2. It is indicated that the Hariharan algorithm is indeed an effective phase shifting interferometry algorithm. |
| Keywords: | displacement phase shifting interferometry algorithm Twyman-Green interferometer Hariharan algorithm piezoelectric transducer |
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