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石墨烯等二维原子晶体薄片样品的光学衬度计算及其层数表征
引用本文:韩文鹏,史衍猛,李晓莉,罗师强,鲁妍,谭平恒.石墨烯等二维原子晶体薄片样品的光学衬度计算及其层数表征[J].物理学报,2013,62(11):110702-110702.
作者姓名:韩文鹏  史衍猛  李晓莉  罗师强  鲁妍  谭平恒
作者单位:中国科学院半导体研究所, 半导体超晶格国家重点实验室, 北京 100083
摘    要:本文以鉴别机械剥离法制备的高质量石墨烯样品的层数为例, 阐明了如何利用传输矩阵来计算二维原子晶体薄片样品的光学衬度, 并进一步精确地鉴别其层数. 计算结果表明测试时所选用的显微物镜数值孔径对精确确定薄片样品的层数非常重要, 并为实验所证实. 同时提出了使用两个激光波长可以快速地表征样品尺寸接近物镜衍射极限的薄片样品层数的方法. 本文所采用的传输矩阵形式非常适合于计算二维原子晶体薄片样品的光学衬度, 并可以方便地推广到更复杂的多层衬底结构, 以便快速和准确地鉴别各种衬底上二维原子晶体薄片样品的厚度. 关键词: 二维原子晶体材料 层数 传输矩阵 光学衬度

关 键 词:二维原子晶体材料  层数  传输矩阵  光学衬度
收稿时间:2012-12-14

The numerical-aperture-dependent optical contrast and thickness determination of ultrathin flakes of two-dimensional atomic crystals: A case of graphene multilayers
Han Wen-Peng,Shi Yan-Meng,Li Xiao-Li,Luo Shi-Qiang,Lu Yan,Tan Ping-Heng.The numerical-aperture-dependent optical contrast and thickness determination of ultrathin flakes of two-dimensional atomic crystals: A case of graphene multilayers[J].Acta Physica Sinica,2013,62(11):110702-110702.
Authors:Han Wen-Peng  Shi Yan-Meng  Li Xiao-Li  Luo Shi-Qiang  Lu Yan  Tan Ping-Heng
Abstract:The optical and electronic properties of two-dimensional atomic crystals including graphene are closely dependent on their layer numbers (or thickness). It is a fundamental issue to fast and accurately identify the layer number of multilayer flakes of two-dimensional atomic crystals before further research and application in optoelectronics. In this paper, we discuss in detail the application of transfer matrix method to simulate the optical contrast of ultrathin flakes of two-dimensional atomic crystals and further to identify their thickness, where numerical aperture of microscope objective is considered. The importance of numerical aperture in the thickness determination is confirmed by the experiments on the graphene flakes. Furthermore, two lasers with different wavelengths can be serviced as light sources for the thickness identification of flakes of two-dimensional atomic crystals with a size close to the diffraction limit of the microscope objective. The transfer matrix method is found to be very useful for the optical-contrast calculation and thickness determination of flakes of two-dimensional atomic crystals on multilayer dielectric substrate.
Keywords: two-dimensional atomic crystals multilayer the transfer matrix optical contrast
Keywords:two-dimensional atomic crystals  multilayer  the transfer matrix  optical contrast
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