溶剂对溶胶-凝胶法制备的掺铝氧化锌透明导电薄膜性质的影响

采用溶胶-凝胶法在玻璃基底上制备得到了高透光率,高导电性的掺铝氧化锌薄膜。研究了溶剂对薄膜晶体结构,薄膜厚度,表面形貌,光学性质和电学性质的影响,结果表明:在相同的制备条件下,薄膜的厚度随溶剂沸点的升高而降低;低沸点溶剂制备的薄膜由c轴择优取向的六角纤锌矿结构的晶体构成,且比较致密;所有薄膜可见光区的透光率在85%以上;乙二醇独甲醚为溶剂制备的薄膜电阻率最低,为3.0×1-0 4Ωm。

Effects of Solvent on Properties of Prepared Aluminum-Doped Zinc Oxide Transparent and Conductive Thin Films by Sol-Gel Method

The high transparent and high conductive aluminum-doped zinc oxide(AZO) thin films were prepared by the sol-gel method on glass substrate.The effects of solvent on structure,thickness,surface morphology,optical and electrical properties of films were investigated.It is found that within the same preparation conditions,the thickness of thin films reduced along with the boiling points of solvents increasing,and the thin films prepared with low boiling point solvents were composed of hexagonal wurtzite crystals with the c-axis preferred orientation,and those thin films were compact,while the transmittances of all the three thin films were over 85% within the visible wavelength region,and the resistivity of the thin film prepared by 2-methoxyethanol solvent was lowest,and the resistivity was 3.0×10-4Ωm.