新型碳材料表面元素及化学态高分辨XPS定量研究*

X射线光电子能谱(XPS)在科学研究中被广泛应用于碳材料表面官能团识别和结构缺陷判定，对表面组成结构识别和性能调控具有重要指导意义。XPS数据分析主观性强、sp²杂化态对应C1s谱峰峰形不对称以及各化学态对应峰位差异相对较小等因素是导致碳材料XPS数据分析难度高的主要原因。本文通过对XPS分析碳材料现状总结了当前新型碳材料XPS数据分析方法的不足(主要包括■化学态对应C1s谱峰峰形不对称峰形、各化学态半峰宽拟合的随意化以及数据的主观化);并结合实际材料通过■化学态谱峰峰形参考化、半峰宽相对限定化以及多数据分析客观化对新型碳材料XPS数据方法进行进一步规范，为XPS应用于新型碳材料表面元素及化学态定量高分辨研究提供理论依据和技术保障。

High Resolution XPS Quantitative Study on Surface Elements and Chemical States of Novel Carbon Materials

The difficulty of XPS data analysis is mainly due to the strong subjectivity of XPS data analysis, the asymmetric peak-to-peak shape of sp2 hybrid state corresponding to C1s, and the relatively small difference between the corresponding peak positions of each chemical state. Based on the current situation of XPS analysis of carbon materials, this paper summarizes the shortcomings of the current XPS data method of new carbon materials, and further standardized the XPS data method of new carbon materials through the peak-to-peak shape reference of chemical state spectrum of C=C, relative limitation of half peak width and objectification of multi-data analysis. It provides theoretical basis and technical guarantee for the application of XPS in the quantitative high-resolution study of surface elements and chemical states of new carbon materials.