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Vacuum anodic discharge as source of ionized fluxes of coating material
Authors:M M Nikitin
Abstract:Cathodic and anodic discharges are effective sources of coating material ionized fluxes. Of special interest is the use of anodic discharges, particularly discharges with a thermoelectronic cathode. The discharge forms fluxes in high vacuum with regulated ionization and the absence of micro liquid droplets. The initiation conditions and characteristics of the discharge in the voltage range from 50 to 500 V with currents up to 5 A were investigated. The dependence of vacuum, interelectrode distance, and cathode heating temperature were considered. Conditions for the production of coating material fluxes with maximum ionization were established.
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