四面体无定型无氢非晶碳膜的制备及其摩擦学性能研究

采用磁过滤阴极真空弧系统分别在硅片Si(100)]、W18Cr4V高速钢和Cr18Ni9不锈钢基体上沉积了一系列sp3键含量较高的四面体无定型无氢非晶碳膜(ta-C),研究了所合成薄膜的结构、硬度、附着强度和摩擦磨损性能,考察了基体和薄膜厚度对薄膜摩擦系数的影响,简要分析了相应ta-C膜的失效机理.结果表明,在高速钢基体上沉积的ta-C膜的显微硬度为76 GPa,结合力Lc值达42 N,具有优良的摩擦学性能,其摩擦系数为0.12,且摩擦系数可以在16 000 r范围内保持稳定.

Preparation and Study of the Tribological Properties of Tetrahedral Amorphous Carbon Film

A series of tetrahedral amorphous carbon films (ta-C) were deposited on silicon wafer Si(100)], W18Cr4V high-speed steel, and Cr18Ni9 stainless steel substrates using a pulsed filtered cathodic vacuum arc system. The mechanical properties, adhesion to substrate, and friction and wear behaviors of the resulting ta-C films were investigated. The effects of the substrate and film thickness on the adhesion to substrate and tribological behaviors of the ta-C films were also examined. It was found that that the ta-C film deposited on the high-speed steel substrate had good comprehensive properties. Namely, it had a microhardness as high as 76 GPa and elastic modulus as high as 453 GPa, while its critical adhesive force (Lc) was as high as 41 N and friction coefficient as small as 0.12. At the same time, the friction coefficient of this kept almost unchanged up to a rotary cycle of 16 000. Therefore, it was rational to predict that the ta-C film deposited on the high-speed steel substrate could be used as a high-quality antiwear and protective coating for various parts made of high-speed steel.