High Quality A1N with a Thin Interlayer Grown on a Sapphire Substrate by Plasma-Assisted Molecular Beam Epitaxy |
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Authors: | REN Fan HAO Zhi-Biao ZHANG Chen HU Jian-Nan LUO Yi |
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Affiliation: | Tsinghua National Laboratory for Information Science and Technology, State Key Laboratory on Integrated Optoelectronics, and Department of Electronic Engineering, Tsinghua University, Beijing 100084 |
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