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Etching Characteristic of Graphite and Metal Substrates by Hydrocarbon Plasma in Closed Cavity |
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| Authors: | Long Lin Zhou Weixing Yang Ling Zhu Ximing Fu Wen |
| Institution: | 1.School of Energy Science and Engineering, Harbin Institute of Technology, Harbin, 150001, Heilongjiang, People’s Republic of China ;2.MIIT Key Laboratory of Critical Materials Technology for New Energy Conversion and Storage, School of Chemistry and Chemical Engineering, Harbin Institute of Technology, Harbin, 150001, Heilongjiang, People’s Republic of China ; |
| Abstract: | Plasma Chemistry and Plasma Processing - Plasma can be used to effectively remove coke from a metal surface. The plasma etching conditions of coke and emission spectrum characteristics on the metal... |
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