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Influence of the substrate optical properties on the backscattering of contaminated microstructures
Authors:P Albella  F Moreno  JM Saiz  F Gonzlez
Institution:

aGrupo de Óptica, Departamento de Física Aplicada, Universidad de Cantabria, 39006 Santander, Cantabria, Spain

Abstract:The presence of small defects in micron-sized structured surfaces introduces small changes in the backscattering that can be assessed by means of an integrated parameter. In this work the influence of the optical properties of the substrate on this technique is analyzed for two different configurations: defect on the microstructure and defect on the substrate beside the microstructure.
Keywords:Backscattering  Particles  Substrate  Optical properties
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