Plasma-chemical decomposition of methane during diamond synthesis

Using a mass spectrometric sampling method, we have observed the decomposition of CH₄ in an rf plasma usedfor diamond deposition. The gas samples were extracted through an orifice located downstream of the plasma zone and analyzed online. For the experiments a dilute mixture of H₂ and CH₄ containing 0.1–3% CH₄ has been used. CH₄ is converted to C₂H₂ and C₂H₄ quantitatively. Small amounts of heavier hydrocarbons are formed. A comparison of the experimental results with a recent kinetic model treating a purely thermal environment is made and the differences between our experiment and the model are explained. The role of acetylene as a species formed in an atmosphere rich in atomic hydrogen is proposed. The electron impact dissociation process is suggested as the rare-determining step in the plasma-chemical decomposition of methane.