| Inner Surface Modification of a Tube by Magnetic Glow-Arc Plasma Source Ion Implantation |
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| 作者姓名： | 张谷令 王久丽 吴杏芳 冯文然 陈光良 顾伟超 牛二武 范松华 刘赤子 杨思泽 |
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| 作者单位： | [1]School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083 [2]Beijing National Laboratory for Condensed Matter Physics and Institute of Physics,Chinese Academy of Sciences, Beijing 100080 |
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| 基金项目： | Supported by the National High Technology Research and Development Programme of China under Grant No 2002AA331020, and the National Natural Science Foundation of China under Grant No 10275088. |
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| 摘 要： | A new method named the magnetic glow-arc plasma source ion implantation （MGA-PSⅡ） is proposed for inner surface modification of tubes. In MGA-PSⅡ, under the control of an axial magnetic field, which is generated by an electric coil around the tube sample, glow arc plasma moves spirally into the tube from its two ends. A negative voltage applied on the tube realized its inner surface implantation. Titanium nitride （TIN） films are prepared on the inner surface of a stainless steel tube in diameter 90mm and length 600mm. Hardness tests show that the hardness at the tube centre is up to 20 GPa. XRD, XPS and AES analyses demonstrate that good quality of TiN films can be achieved.
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| 关 键 词： | 内表面修正 弧度等离子源 离子输入 等离子物理 |
| 收稿时间： | 2005-11-25 |
| 修稿时间： | 2005-11-25 |
Inner Surface Modification of a Tube by Magnetic Glow-Arc Plasma Source Ion Implantation |
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| ZHANG Gu-Ling, WANG Jiu-Li, WU Xing-Fang, FENG Wen-Ran,CHEN Guang-Liang, GU Wei-Chao, NIU Er-Wu,FAN Song-Hua, LIU Chi-Zi, YANG Si-Ze.Inner Surface Modification of a Tube by Magnetic Glow-Arc Plasma Source Ion Implantation[J].Chinese Physics Letters,2006,23(5):1241-1244. |
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| Authors: | ZHANG Gu-Ling WANG Jiu-Li WU Xing-Fang FENG Wen-Ran CHEN Guang-Liang GU Wei-Chao NIU Er-Wu FAN Song-Hua LIU Chi-Zi YANG Si-Ze |
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| Institution: | 1 School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083; 2 Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences, Beijing 100080 |
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