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Dynamics of the hydrodynamical growth of columns on silicon exposed to ArF excimer-laser irradiation |
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| Authors: | F Sánchez JL Morenza R Aguiar JC Delgado M Varela |
| Institution: | (1) Universitat de Barcelona, Departament de Física Aplicada i Electrònica, Avda. Diagonal 647, E-08028 Barcelona, Spain (Fax: +34-3/402-1138, E-mail: fsanchez@electra.fae.ub.es), ES |
| Abstract: | Received: 6 January 1997/Accepted: 8 July 1997 |
| Keywords: | PACS: 81 40 Z 81 60 Z 68 70 |
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