Wachstum dünner Fluorkohlenstoffschichten auf der Anode einer Glühkathodenentladung |
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Authors: | U Lippold H-U Poll K-H Wickleder |
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Institution: | Technische Hochschule Karl-Marx-Stadt, Sektion Physik/Elektronische Bauelemente, Lehrbereich Experimentalphysik, 901 Karl-Marx-Stadt, Straβe der Nationen 62, Germany |
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Abstract: | The polymerization of tetrafluorethylene on the anode of a hot glow discharge has been investigated. Rates of polymer deposition have been measured as a function of monomer pressure, discharge current density, and electrode surface temperature. A mechanism of polymer formation is suggested. The results are different from those obtained by polymerization of the same monomer in a glow discharge. It is concluded that negative ions have a great influence on mechanism of polymer formation. Additionally, monomer molecules adsorbed at the electrode are polymerized by electron bombardment. |
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