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Wachstum dünner Fluorkohlenstoffschichten auf der Anode einer Glühkathodenentladung
Authors:U Lippold  H-U Poll  K-H Wickleder
Institution:Technische Hochschule Karl-Marx-Stadt, Sektion Physik/Elektronische Bauelemente, Lehrbereich Experimentalphysik, 901 Karl-Marx-Stadt, Straβe der Nationen 62, Germany
Abstract:The polymerization of tetrafluorethylene on the anode of a hot glow discharge has been investigated. Rates of polymer deposition have been measured as a function of monomer pressure, discharge current density, and electrode surface temperature. A mechanism of polymer formation is suggested. The results are different from those obtained by polymerization of the same monomer in a glow discharge. It is concluded that negative ions have a great influence on mechanism of polymer formation. Additionally, monomer molecules adsorbed at the electrode are polymerized by electron bombardment.
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