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| 定量检验光学元件面形的数字刀口仪技术研究 | |
| 引用本文： | 王小鹏,朱日宏.定量检验光学元件面形的数字刀口仪技术研究[J].应用光学,2009,30(1):69-72. |
| 作者姓名： | 王小鹏 朱日宏 |
| 作者单位： | 1. 西安应用光学研究所,陕西西安710065;南京理工大学光电学院,江苏南京210094 2. 南京理工大学光电学院,江苏南京,210094 |
| 摘 要： | 在传统刀口仪的基础上，提出一种数字化刀口仪,利用该刀口仪可实现球面光学元件表面面形的定量检验。介绍数字刀口仪的组成、工作原理及测试过程等,并利用该刀口仪对一个半径为1000mm，口径为160mm的球面光学元件的面形进行了实际测量，给出了光学元件均方根值和峰谷值测量结果，最后对测量结果进行了讨论。 |
| 关 键 词： | 刀口检验 面形误差 数字刀口仪 图像处理 波像差 |
| 收稿时间： | 2008/10/20 |
Quantitative evaluation for wavefront of optical elements with digitized Foucault tester |
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| WANG Xiao-peng,ZHU Ri-hong.Quantitative evaluation for wavefront of optical elements with digitized Foucault tester[J].Journal of Applied Optics,2009,30(1):69-72. | |
| Authors: | WANG Xiao-peng ZHU Ri-hong |
| Institution: | 1. Xi′an Institute of Applied Optics, Xi′an 710065, China; 2. Nanjing University of Science and Technology, Nanjing 210094, China |
| Abstract: | A digital knife-edge test system is proposed based on the traditional Foucault tester. Quantitative evaluation for the wavefront of spherical optical elements was achieved by using this test system. The system configuration, principle and testing process are described in the paper. The surface of a spherical optical element with the radius of 1000mm and the aperture of 160mm was tested with the test system. The measured RMS and P-V values of the wavefront error of the optical element under test are given. The measured results are discussed. |
| Keywords: | Foucault test wavefront error digital knife-edge testing system image processing wave aberration |
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