Self-consistent calculation of electrostatic force for two kinds of mesoscopic surface structures

The scanning electrostatic force microscopy (SEFM) can acquire information of surface structures in a non-contact way. We calculate the electrostatic force between the charged tip and polarized surface structure in SEFM in the framework of self-consistent integral equation formalism (SCIEF), incorporating the image method to treat the electrostatic coupling of substrate and tip. We consider two kinds of surface structures, one is the topographic structure on the surface, the other is the dielectric structure embedded in the substrate. The force pattern of the topographic structure shows a protrusion around the surface structure. However, the force pattern displays a hollow around an embedded structure with a dielectric constant less than that of substrate medium. For an embedded structure with a larger dielectric constant, the force pattern exhibits a protrusion, and the force signal is much weaker than that of the topographic structure. Therefore, it is expected that one may identify these surface structures from the pure electrostatic force information in SEFM. The force signal of the densely arranged dielectric pads is simply the superposition of force signal of each pad individually, the interference effect of electric field is not remarkable. Received: 26 March 1998 / Accepted: 9 June 1998