The influence of electron scattering on the lineshape of auger and photoelectron spectra |
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| Affiliation: | 1. Université Libre de Bruxelles, Service de Métrologie Nucléaire (CP 165/84), av. F. D. Roosevelt 50, B-1050 Brussels, Belgium;2. Department of Physics, Chemistry and Pharmacy, University of Southern Denmark, DK-5230 Odense M, Denmark;3. Instituto de Ciencia de Materiales de Sevilla (CSIC — Univ. Sevilla), av. Américo Vespucio 49, E-41092 Sevilla, Spain |
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| Abstract: | ![]()
A simplified model of Auger and photoelectron scattering in solids is presented. Within the framework of the model the relation between the distribution of backscattered primary electrons and Auger photoelectron distribution is obtained in terms of the geometric factor and the density of inelastic electron scattering probability. The new algorithm of spectrum background subtraction is formulated and applied to process the X-ray photoelectron and Auger spectra for a series of oxygen, fluorine, and copper compounds. It is shown that the method accuracy for the peak area measurements is better than 10%. |
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