Distribution of boron and phosphorus ion paths in amorphous germanium

Distributions of the projected paths of boron and phosphorus ions with energies E = 25–150 keV in germanium are obtained experimentally and by means of Monte-Carlo calculations. Good agreement is established between the calculated and experimental data for boron ions. Phosphorus experimental paths are 30% less than calculated. It is shown that it is not possible to explain the discrepancy by the lack of correspondence of the true electronic deceleration to the value calculated according to the Lindhard-Scharff theory. The results are discussed from the viewpoint of the influence of shell effects on the elastic and inelastic deceleration of the ions.Translated from Izvestiya VUZ. Fizika, Vol. 15, No. 1, pp. 43–49, January, 1972.