Polarization modulation imaging ellipsometer

The polarization modulation technique was successfully combined with parallel synchronous detection using a switching light source and a CCD camera to realize full-frame measurement of ellipsometric parameters. The detected thickness of a monolayer film of n-octadecylsiloxane agreed well with theoretical and reported experimental values. The thickness resolution for imaging and the temporal noise in parallel thickness measurements were smaller than +/-0.1 nm and smaller than +/-0.02 nm, respectively.