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Semi-empirical calculations for the ranges of fast ions in silicon
Authors:Yu.A. Belkova  Ya.A. Teplova
Affiliation:D. V. Scobeltsin Institute of Nuclear Physics, Lomonosov State University, Moscow, Russia
Abstract:A semi-empirical method is proposed to calculate the ion ranges in energy region E?=?0.025–10?MeV/nucleon. The dependence of ion ranges on the projectile nuclear charge, mass and velocity is analysed. The calculations presented for ranges of ions with nuclear charges Z?=?2–10 in silicon are compared with SRIM results and experimental data.
Keywords:Ranges of ions  energy loss  charge exchange
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