Semi-empirical calculations for the ranges of fast ions in silicon |
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Authors: | Yu.A. Belkova Ya.A. Teplova |
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Affiliation: | D. V. Scobeltsin Institute of Nuclear Physics, Lomonosov State University, Moscow, Russia |
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Abstract: | A semi-empirical method is proposed to calculate the ion ranges in energy region E?=?0.025–10?MeV/nucleon. The dependence of ion ranges on the projectile nuclear charge, mass and velocity is analysed. The calculations presented for ranges of ions with nuclear charges Z?=?2–10 in silicon are compared with SRIM results and experimental data. |
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Keywords: | Ranges of ions energy loss charge exchange |
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