Application of the two-dimensional lateral microanalysis by SIMS and EPMA in materials research |
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| Authors: | S. Oswald, L. Siegert G. Groß e |
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| Affiliation: | (1) Zentralinstitut für Festkörperphysik and Werkstofforschung, Institut Strukturforschung and Festkörperanalytik, Helmholtzstrasse 20, O-8027 Dresden, Federal Republic of Germany |
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| Abstract: | ![]()
Summary Possibilities of the measurement of elemental maps and their digital processing are demonstrated. Hardware and software developments and some applications for various material problems are discusses. |
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