| 氮离子注入对类球状微米金刚石聚晶膜的影响 |
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| 引用本文： | 高金海,张武勤,李祯.氮离子注入对类球状微米金刚石聚晶膜的影响[J].物理实验,2011,31(10):8-11. |
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| 作者姓名： | 高金海 张武勤 李祯 |
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| 作者单位： | 郑州师范学院物理系,河南,郑州,450044 |
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| 基金项目： | 教育部科学技术重点资助项目 |
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| 摘 要： | 利用微波等离子体化学气相沉积法,在覆盖金属钛层的陶瓷衬底上制备出类球状微米金刚石聚晶膜,后对膜的表面进行氮离子的注入.通过扫描电子显微镜、拉曼光谱、X射线衍射谱及二级结构场发射测试,对膜进行了注入前后的分析.氮离子注入后场致电子发射的效果变强,这可能是氮离子的注入增加了类球状微米金刚石聚晶膜表面的缺陷度,从而增加了价带和导带间的缺陷能级,使电子更容易跃迁到高能级上,提高了场致电子的发射效果.
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| 关 键 词： | 微波等离子体化学气相沉积 场致电子发射 类球状微米金刚石聚晶 氮离子注入 |
Effect of nitrogen ion implantation on the field emission properties of globe-like diamond microcrystalline-aggregate |
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| GAO Jin-hai,ZHANG Wu-Qin,LI Zhen.Effect of nitrogen ion implantation on the field emission properties of globe-like diamond microcrystalline-aggregate[J].Physics Experimentation,2011,31(10):8-11. |
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| Authors: | GAO Jin-hai ZHANG Wu-Qin LI Zhen |
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| Institution: | GAO Jin-hai,ZHANG Wu-Qin,LI Zhen(Department of Physics,Zhengzhou Normal University,Zhengzhou 450044,China) |
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| Abstract: | The globe-like diamond microcrystalline-aggregates were grown by microwave plasma chemical vapor deposition method on ceramic substrate with Ti metal layer.The surface of the carbon film was injected by nitrogen ions.The carbon films were evaluated by Raman scattering spectroscopy,X-ray diffraction spectrum and scanning electron microscopy.The field emission properties of the globe-like diamond microcrystalline-aggregates were discussed.The experimental results showed that the morphology of the film before ... |
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| Keywords: | microwave plasma chemical vapor deposition field emission globe-like diamond microcrystalline-aggregate nitrogen ion implantation |
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