| 电阻蒸发铝薄膜结构及其对非晶硅太阳电池性能的影响 |
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| 引用本文： | 孙建,薛俊明,侯国付,王锐,张德坤,赵颖,耿新华.电阻蒸发铝薄膜结构及其对非晶硅太阳电池性能的影响[J].人工晶体学报,2007,36(1):152-156. |
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| 作者姓名： | 孙建 薛俊明 侯国付 王锐 张德坤 赵颖 耿新华 |
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| 作者单位： | 南开大学光电子薄膜器件与技术研究所,天津,300071;光电子薄膜器件与技术天津市重点实验室,天津,300071;光电信息技术科学教育部重点实验室,天津,300071 |
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| 基金项目： | 天津市科技发展基金;国家重点基础研究发展计划(973计划);天津市自然科学基金 |
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| 摘 要： | 本文首先采用电阻蒸发法制备了不同厚度的Al薄膜,并选择了两个典型厚度的Al薄膜制备工艺来制备非晶硅太阳电池的Al背电极,研究了Al背电极厚度对电池性能的影响.结果表明,Al背电极的厚度由800nm减薄到70nm时,电池的Voc平均值由0.826V增加到0.829V,电池的Jsc平均值由11.747mA/cm2减小到11.318 mA/cm2,电池的FF平均值由0.701增加到0.728,而电池效率的平均值略有增加,由6.803;增加到6.833;.用扫描电镜(SEM)和X射线衍射(XRD)研究了玻璃衬底上蒸发的Al薄膜和非晶硅电池Al背电极表面形貌和微观结构的变化,分析了电池性能随Al背电极厚度变化的原因.
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| 关 键 词： | 电阻蒸发 Al背电极 非晶硅太阳电池 |
| 文章编号： | 1000-985X（2007）01-0152-05 |
| 修稿时间： | 2006-09-14 |
Structural Characteristic of Thermal Evaporated Al Back-electrodes and Its Influence on the Performance of a-Si:H Solar Cells |
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| SUN Jian,XUE Jun-ming,HOU Guo-fu,WANG Rui,ZHANG De-kun,ZHAO Ying,GENG Xin-hua.Structural Characteristic of Thermal Evaporated Al Back-electrodes and Its Influence on the Performance of a-Si:H Solar Cells[J].Journal of Synthetic Crystals,2007,36(1):152-156. |
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| Authors: | SUN Jian XUE Jun-ming HOU Guo-fu WANG Rui ZHANG De-kun ZHAO Ying GENG Xin-hua |
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| Institution: | Institute of Photo-electronics Thin Film Devices and Technique of Nankai University, Tianjin 300071, China; Key Laboratory of Photo-electronic Thin Film Devices and Technique of Tianjin, Tianjin 300071, China; Key Laboratory of Optoelectronic Information Science and Technology, Ministry of Education,Tianjin, 300071, China |
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| Abstract: | In this paper,Al films with different thickness were prepared by thermal evaporation technique.The Influence of the Al back-electrodes on the performance of a-Si:H solar cells were studied.The results showed that,with the decreasing of Al thicknesses,Voc and FF increased,while Jsc decreased,and then the efficiencies increased from 6.803% to 6.833%.Scanning electron microscopy and X-ray diffraction techniques were used to identify the change in surface and microstructure of aluminum back electrodes.Finally,the dependence of a-Si:H solar cell performance on Al back electrode thickness and microstructure were analyzed in detail. |
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| Keywords: | thermal evaporation aluminum back electrode a-Si:H solar cell |
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