能动抛光磨盘的变形实验研究

 能动抛光磨盘实时产生不同的表面变形，在对大口径非球面光学元件进行精磨和抛光时实现与工件表面良好的大尺寸吻合，可以消除传统光学加工采用小尺寸磨头时带来的高频残余误差并提高加工效率。以加工直径1.3m左右，F/2的抛物面光学元件为例，对能动磨盘在不同离轴度时能够产生的变形进行了计算和实验。结果表明，能动磨盘能够以较高精度产生旋转对称或非对称的抛物面形状。对能动磨盘产生变形后的残余误差进行了分析。

Investigation of deformation experiment for active polishing lap

In optics polishing process, the active lap can reshape the profile for fitting the surface of large aspheric optical component with different local position and rotating angle in real time. In this way, the high order residual error by traditional polishing technique can be overcome. In this paper, the working process of active lap is modeled. The deforming capability of the active lap matching a parabolic mirror, diameter 1.3m and F/2, is simulated and verified by experiment. The results show the active 1ap can reshape the quadratic curved figure, both symmetrically and dissymmetrically with high precision. The residual errors of deflection are analyzed.