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Electron-beam chemical lithography with aliphatic self-assembled monolayers |
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| Authors: | Ballav Nirmalya Schilp Soeren Zharnikov Michael |
| Affiliation: | Angewandte Physikalische Chemie, Universit?t Heidelberg, 69120 Heidelberg, Germany, Fax: (+49)?6221‐54‐6199 |
| Abstract: | |
| Keywords: | electron beams lithography monolayers polymer brushes self‐assembly |
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