Quantitative Autoradiographie an Halbleiterma Terial mit Phosphor-diffundierten Standards

A suitable standard smaple was developed and tested on the basis of phosphorus for the quantitative autoradiography of elements of interest in semiconductor technology. By the aid of silicon disks with a phosphorus concentration of 6·10¹⁷ atoms·cm^?2 the error of the quantitative autoradiographic method is determined. The relative mean error of the density measurement is at best ±4%; the relative mean error of the determination of phosphorus concentration by use of an error-free standard sample is about ±15%. This method will be extended to other elements by use of this standard sample of phosphorus.