首页 | 本学科首页   官方微博 | 高级检索  
     


Superresolved femtosecond laser ablation
Authors:Merano Michele  Boyer Gilbert  Trisorio Alexandre  Chériaux Gilles  Mourou Gérard
Affiliation:Laboratoire d'Optique Applique, ENSTA - Ecole Polytechnique, Chemin de la Hunière 91761 Palaiseau, France. merano@molphys.leidenuniv.nl
Abstract:The determinist behavior of the femtosecond ablation process allows morphing features well under the diffraction limit by utilizing the thresholding effect, down to the nanometer scale. Because there are a vast range of applications where scaling down the size of the features is a major concern, we investigate the use of superresolving pupil plane filters. As is well known, these filters redistribute the focused optical intensity for a narrower bright spot and, as a trade-off, increase the sidelobes. However, this drawback can be rendered insignificant if all the outer optical power is kept under the determinist threshold value. Two types of pure absorbing binary filter have been tried, giving credence to a size reduction of the ablations in fused silica.
Keywords:
本文献已被 PubMed 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号