极坐标激光直写法制作圆对称连续衍射元件掩模的能量表征方法研究

采用激光直写法制作连续衍射光学元件,具有过程简单、周期短、成本低等优点。介绍了极坐标激光直写法制作圆对称连续衍射元件的原理。通过实验,研究了衍射微结构深度与激光功率、曝光位置半径与激光功率的关系。实验结果显示,在相同曝光位置半径条件下,微结构深度与激光功率呈正比;在相同微结构深度条件下,曝光位置半径与激光功率呈正比。分析总结出了极坐标激光直写法制作圆对称连续衍射元件的能量表征方法,并采用该方法成功制作了圆对称连续衍射聚光透镜掩模。

Laser power characterization method for fabrication of centrosymmetric CR-DOEs mask by polar laser direct writing

The technology for fabricating CR-DOE by laser direct writing method has advantages of simple process,time saving and low cost.The charactering method of laser power is studied.The theory of fabricating of CR-DOE by laser direct writing method is described.The relations between microstructure depth and laser power,exposing position radius and laser power are studied.The results show that both microstructure depth and exposing position radius change in direct ratio to laser power.The charactering method is g...