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| 梯度磁场中薄膜厚度梯度的形成机理 | |
| 引用本文： | 朱炎,狄国庆,陈亚杰,赵登涛. 梯度磁场中薄膜厚度梯度的形成机理[J]. 浙江大学学报(理学版), 2002, 29(4): 395-399 |
| 作者姓名： | 朱炎 狄国庆 陈亚杰 赵登涛 |
| 作者单位： | 苏州大学,物理系,江苏,苏州,215006 |
| 摘 要： | 借助于基片下方放置的磁铁，在溅射的放电空间中引入了纵向的梯度磁场，辉光放电时，其外貌发生了显著的收缩，由此沉积的薄膜在平面内存在明显的厚度梯度，用磁场中带电粒子的运动理论解释了此种薄膜的形成机制。 |
| 关 键 词： | 形成机理 磁场梯度 磁控溅射 辉光放电 厚度梯度 动量转移 铁磁性薄膜 |
| 文章编号： | 1008-9497(2002)04-395-05 |
| 修稿时间： | 2001-04-08 |
Formation of the film-thickness gradient for films deposited in a gradient magnetic field |
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| ZHU Yan,DI Guo-qing,CHEN Ya-jie,ZHAO Deng-tao. Formation of the film-thickness gradient for films deposited in a gradient magnetic field[J]. Journal of Zhejiang University(Sciences Edition), 2002, 29(4): 395-399 | |
| Authors: | ZHU Yan DI Guo-qing CHEN Ya-jie ZHAO Deng-tao |
| Abstract: | A longitudinal gradient magnetic field was introduced into the discharge space by placing a permanent magnet under the substrate. The configuration of the glow clearly contracted in this case. And a great thickness gradient in the film plane was detected by measuring the thickness of the film. The authors interpreted such mechanism with the motion theory of charged particles in magnet field. |
| Keywords: | gradient of magnetic field magnetic mirror magnetron sputtering glow thickness gradient |
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