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Novel optical lithography using silver superlens |
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| Authors: | Haiyan Qin Xuan Li Su Shen |
| Abstract: | This work has demonstrated that with silver superlens,the resolution of conventional optical lithography can be improved significantly.Experimental and simulative results are given to verify the facts that the resolution and the pattern fidelity are sensitive to the contact tightness between layers. |
| Keywords: | silver optical lithography Experimental results verify facts pattern fidelity sensitive contact layers resolution conventional improved work |
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