| JEE—4x型真空镀膜仪功能扩展 |
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| 引用本文： | 于冰,王大庆.JEE—4x型真空镀膜仪功能扩展[J].分析测试技术与仪器,1996,2(2):1-4. |
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| 作者姓名： | 于冰 王大庆 |
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| 作者单位： | 中国矿业大学分析测试中心 |
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| 摘 要： | 报道了对ＪＥＥ－４ｘ型真空镀膜仪蒸发装置的改进以及建立蒸发材料回收装置的具体方法，并介绍了改进后该仪器在高分辨扫描电镜样品制备上的应用实例．实验证明，上述改进不但扩展了ＪＥＥ—４ｘ型真空镀膜仪的制样功能又节省了蒸发材料，集中了离子溅射法及常规高真空镀膜法的优点，完全满足ＳＥＭ样品的分析要求，该方法简单易操作．
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| 关 键 词： | 蒸发装置 镀膜 SEM 功能扩展 电子显微镜 |
| 收稿时间： | 1995/12/6 0:00:00 |
| 修稿时间： | 2/8/1996 12:00:00 AM |
Function Development of JEE-4x Vacuum Evaporator |
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| Yu Bing and Wang Daqing.Function Development of JEE-4x Vacuum Evaporator[J].Analysis and Testing Technology and Instruments,1996,2(2):1-4. |
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| Authors: | Yu Bing and Wang Daqing |
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| Institution: | China University of Mining and Technology, Xuzhou 221008;China University of Mining and Technology, Xuzhou 221008 |
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| Abstract: | The JEE-4x Vacuum Evaporator is modified.The improved set can expand the original sample preparation function and save the material for evaporation.The developed is simple and easy to operate.It has the advantage of both the ion-sputtering method and the normal high vacuum plating method and can meet the requirement of SEM anlysis. |
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| Keywords: | Evaporation Plating film SEM Function development |
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