Optical characteristics of the steady-state plasma of a longitudinal discharge in a He/CFC-12 mixture

The emission from the plasma of a contracted longitudinal dc discharge in a He/CF₂Cl₂ mixture in the wavelength range 130–300 nm is investigated. It is shown that the discharge plasma emits within the range 150–260 nm. The emission consists mainly of the broad bands of Cl₂ molecules and single-charged chlorine ions. The pressure and composition of the working mixtures, the discharge current, and the time during which the emitter can operate on a single gas fill are optimized to attain the best characteristics of UV and VUV radiation. The results obtained are of interest for developing a steady-state source of VUV and UV radiation to be applied in microelectronics, photochemistry, and medicine.