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基于迈克尔逊干涉的傅里叶变换散斑形貌测量技术
引用本文:马志芳,高秀梅,孙平. 基于迈克尔逊干涉的傅里叶变换散斑形貌测量技术[J]. 应用光学, 2008, 29(6): 874-877
作者姓名:马志芳  高秀梅  孙平
作者单位:1. 山东师范大学,物理与电子科学学院,山东,济南,250014
2. 济南市铁道职业技术学院,电气工程系,山东,济南,250013
摘    要:提出了电子散斑干涉载频调制测量物体形貌的方法。采用典型的迈克尔逊干涉光路,将物体偏转一微小角度(等效为物面与参考面间形成空气楔)产生等厚干涉,可在物体的表面引入包含物体高度信息的载波干涉条纹。用CCD采集该载波条纹图,利用傅里叶变换法可解调出物体高度的位相信息,从而实现物体的形貌测量。介绍了电子散斑干涉载频调制测量物体形貌的原理,并进行了实物测量,给出了实验结果。由于该方法采用散斑干涉方法测量物体形貌,所以具有灵敏度高的优点。

关 键 词:物理光学  电子散斑干涉  形貌测量  傅里叶变换  迈克尔逊干涉
收稿时间:2008-03-10

Fourier-transform speckle profilometry based on Michelson interference
MA Zhi-fang,GAO Xiu-mei,SUN Ping. Fourier-transform speckle profilometry based on Michelson interference[J]. Journal of Applied Optics, 2008, 29(6): 874-877
Authors:MA Zhi-fang  GAO Xiu-mei  SUN Ping
Affiliation:1. College of Physics and Electronics, Shandong Normal University, Jinan 250014, China; 2. Department of Electrical Engineering, Jinan Railway Polytechnic, Jinan 250013, China
Abstract:A method of shape measurement based on ESPI carrier-frequency modulation is presented. In the typical setup of Michelson interferometer, turning the tested object a small angle generates an air wedge between the object plane and the reference plane. The wedge produces equal thickness interference fringes. A carrier fringe pattern containing height information is formed on the object surface. The carrier fringe pattern is captured by a CCD camera. The phase of the object can be derived by Fourier transform and the shape measurement is realized. The principle of the method is described and the experiment results are given. The results indicate that the method has the virtue of high sensitivity because speckle pattern interferometry is used.
Keywords:physical optics  electronic speckle pattern interferometry (ESPI)  shape measurement  Fourier transform  Michelson interference
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