Correlation Between the Electrical and Optical Properties of an Atmospheric Pressure Plasma During Siloxane Coating Deposition |
| |
| Authors: | B Twomey A Nindrayog K Niemi W G Graham D P Dowling |
| |
| Institution: | (1) Surface Engineering Group, School of Electrical, Electronic and Mechanical Engineering, UCD, Belfield, Dublin 4, Ireland;(2) Centre of Plasma Physics, School of Mathematics and Physics, Queen’s University, Belfast, BT7 1NN, UK; |
| |
| Abstract: | The effect of varying process parameters on atmospheric plasma characteristics and properties of nanometre thick siloxane
coatings is investigated in a reel-to-reel deposition process. Varying plasma operation modes were observed with increasing
applied power for helium and helium/oxygen plasmas. The electrical and optical behaviour of the dielectric barrier discharge
were determined from current/voltage, emission spectroscopy and time resolved light emission measurements. As applied power
increased, multiple discharge events occurred, producing a uniform multi-peak pseudoglow discharge, resulting in an increase
in the discharge gas temperature. The effects of different operating modes on coating oxidation and growth rates were examined
by injecting hexamethyldisiloxane liquid precursor into the chamber under varying operating conditions. A quenching effect
on the plasma was observed, causing a decrease in plasma input power and emission intensity. Siloxane coatings deposited in
helium plasmas had a higher organic component and higher growth rates than those deposited in helium/oxygen plasmas. |
| |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ |
|
