| 激光沉积超导薄膜过程中出射粒子速度的飞行时间谱分析 |
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| 引用本文： | 范永昌,安承武.激光沉积超导薄膜过程中出射粒子速度的飞行时间谱分析[J].光学学报,1991,11(7):98-601. |
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| 作者姓名： | 范永昌 安承武 |
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| 作者单位： | 华中理工大学激光技术国家实验室，华中理工大学激光技术国家实验室，华中理工大学激光技术国家实验室，华中理工大学激光技术国家实验室，华中理工大学激光技术国家实验室 武汉 430O74，武汉 430O74，武汉 430O74，武汉 430O74，武汉 430O74 |
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| 摘 要： | 采用飞行时间谱技术,测量了准分子激光烧蚀沉积高温超导薄膜过程中,由靶面出射粒子的飞行速度。研究了粒子速度与充氧压及其激光能量密度的关系。讨论了高能粒子在薄膜原位低温外延生长中的作用。
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| 关 键 词： | 激光烧蚀 飞行时间谱 粒子速度 |
| 收稿时间： | 1990/9/17 |
The time of flight spectra analysis of ejected partical velocities during laser deposition of high Tc superconducting film |
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| FAN YONGCHANG,AN CHENGWU,NING Bo,LU DONGSHENG AND LIZAIGUANG.The time of flight spectra analysis of ejected partical velocities during laser deposition of high Tc superconducting film[J].Acta Optica Sinica,1991,11(7):98-601. |
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| Authors: | FAN YONGCHANG AN CHENGWU NING Bo LU DONGSHENG AND LIZAIGUANG |
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| Abstract: | The time of flight spectra technique was adopted to measure the velocities of ejected particals from the target surface during the process of laser deposition of high To superconducting film. The dependence of velocities on oxygen pressure and laser energy density was studied. The mechanism of producing high energy particala and its relevance to the thin film formation is discussed. |
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| Keywords: | laser ablation time of flight spectra partioal velocities |
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