| 薄膜厚度对AgInSbTe相变薄膜的光学性质的影响 |
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| 引用本文： | 李进延,侯立松,干福熹.薄膜厚度对AgInSbTe相变薄膜的光学性质的影响[J].光学学报,2001,21(8):52-956. |
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| 作者姓名： | 李进延 侯立松 干福熹 |
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| 作者单位： | 中国科学院上海光学精密机械研究所, |
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| 基金项目： | 国家自然科学基金委员会重点项目 (5 9832 0 60 )，中国科学院九五基础性研究 (KJ95 1 B1 70 1)资助课题 |
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| 摘 要： | 采用射频溅射法制备了Ag8In14Sb55Te23相变薄膜，对深积态薄膜在300℃时进行了热处理，测量了不同厚度薄膜的反射、吸收谱及光学常数。研究了薄膜的光学常数与薄膜厚度的关系。结果表明在一定的厚度范围其光学常数随膜层厚度的不同有较大的变化，尤其在短波长范围内更为明显，这对于短波长记录相变光盘有重要意义。
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| 关 键 词： | 相变薄膜 Ag－In－Sb－Te 光学常数 半导体 |
Effect of Film Thickness on Optical Properties of AgInSbTe Phase-Change Films |
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| Li Jinyan,Hou Lisong,Gan Fuxi.Effect of Film Thickness on Optical Properties of AgInSbTe Phase-Change Films[J].Acta Optica Sinica,2001,21(8):52-956. |
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| Authors: | Li Jinyan Hou Lisong Gan Fuxi |
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| Abstract: | The dependence of the optical properties on the thickness of AgInSbTe phase change films is investigated. The reflectivity, absorptivity, thickness and optical constant of the films were measured. The change of the extinction coefficient and refractive index become significant when the film is very thin, and become larger at shorter wavelengths such as in blue and green region. These results are very useful in improving the accuracy of optical design and simulation of AgInSbTe phase change optical disks, as well as in the study of phase change optical disks at shorter wavelengths. |
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| Keywords: | phase change film AgInSbTe optical properties film thickness |
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